Waferpedia

Comparison ledger

S 4700 IIversus1.112 PSL Wafer

Hitachi S 4700 II, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
S 4700 IIHitachi
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 4700KLA 1.112 PSL Wafer
Specifications
ConfigurationSingle Phase[1]NIST Traceable[2]
Wafer Size—8 inch[2]
NIST Traceable—True[2]
Compatible Tools—Surfscan 6xy0 and Sp1[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com