Comparison ledger
Hitachi Kokusai DD 823 V Vertical Diffusion, Tokyo Electron Alpha 8 SE D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alpha 8 SE DTokyo Electron | |
|---|---|---|
| OEM | Hitachi | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi Kokusai | Tokyo Electron Alpha |
| Specifications | ||
| Process | H2 Anneal[2] | Hi Temp Oxide[4] |
| System Layout | Main, Utility[2] | — |
| System Type | L Type[2] | L Type[1] |
| Configuration | No Side Maintenance[2] | High Temp Oxide[1] |
| System Paint Color | Ivory[2] | — |
| Furnace Front Surface Finish | Painted[2] | — |
| Rapid Cooling Unit | Not Installed[2] | — |
| N2 Load Lock | Not Installed[2] | — |
| O2 Analyzer | Not Installed[2] | — |
| Cassette I/O Type | SMIF[2] | Normal I/O Type[1] |
| SMIF | Asyst / Indexer 2200[2] | — |
| AVG Compatibility | Unable[2] | — |
| System Main Controller | CX 3002 A[2] | Waves[1] |
| Mechanical Controller | CX 1215-1, 1215-2[2] | Waves[1] |
| Sequence Controller | CX 1312[2] | Waves[1] |
| Gas Controller | CX 3201 B[2] | Waves[1] |
| Gs Flow Chart Panel | Installed (Front)[2] | — |
| Operational Panel | Installed (Front)[2] | — |
| Signal Tower/ colors | Not Installed[2] | — |
| Furnace Temperature Controller | CQ 1600[2] | 560 A[1] |
| Furnace Over-temp Detector | DN 150[2] | — |
| Gas Detector | Riken Keiki GD-V 11 D[2] | GD-K 7 D 4[1] |
| Detecting Gas | H2[2] | Hcl, N2O[1] |
| Host Communications | Yes[2] | — |
| User Host Computer I/F | HSMS[2] | SECS[1] |
| Process Gas | N2, H2[2] | N2, O2, H2, N2O[1] |
| Basic Style (Gas System) | Integrated Gas System (Fujikin)[2] | — |
| Wafer Qty in Cassette | 26[2] | — |
| Cassette Storage Qty | 24[2] | — |
| Fork Type | 1 + 4 (VAC)[2] | — |
| Fork-Wafer Presence Sensor | Installed[2] | — |
| Fork-Variable Pitch | Installed[2] | — |
| Wafer size | 8 inch[2] | 6 inch[1] |
| Cassette I/O type | SMIF with Asyst/Indexer 2200[2] | — |
| Cassette I/O type (alternative) | Normal I/O[3] | — |
| System main controller (alternative) | CX 2003 A[3] | — |
| Furnace temperature controller (alternative) | CQ 1500 A[3] | — |
| Gas detector | Riken Keiki GD-V 11 D (H2)[2] | — |
| Gas detector (alternative) | Riken Keiki GD-D 8 V (H2)[3] | — |
| Gas system basic style | Integrated Gas System (Fujikin)[2] | — |
| User host computer interface | HSMS[2] | — |
| Wafer quantity per cassette | 26[2] | — |
| Wafer quantity per cassette (alternative) | 25[3] | — |
| Cassette storage quantity | 24[2] | — |
| Cassette storage quantity (alternative) | 21[3] | — |
| Auto wafer aligner | Not installed[2] | — |
| Auto wafer aligner (alternative) | Installed[3] | — |
| Vintage (year) | 1997[2] | — |
| Vintage (year) (alternative) | 1995[3] | — |
| OEM | Hitachi Kokusai[2] | Tel[1] |
| Model | DD 823 V[2] | Alpha 8 SE D[1] |
| Equipment type | Vertical Diffusion Furnace[2] | Furnace[1] |
| Heater Model | — | VMU-40-007EX (1200 Deg C)[1] |
| AGV Compatibility | — | Unable[1] |
| Gas Flow Chart Panel | — | Installed (Front, Rear)[1] |
| Optional Panel | — | Installed (Front, Rear)[1] |
| Signal Tower / Colors | — | Installed, 3 colors[1] |
| Furnace Overtemp Detector | — | Fenwal / MDMR-5FR[1] |
| Basic Style | — | Integrated Gas System (Fujikin)[1] |
| Vintage | — | 2006[1] |
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