Comparison ledger
Hitachi 1305 BSG 3, Tokyo Electron Clean Track Mark 8 Resist, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | Clean Track Mark 8 ResistTokyo Electron |
|---|---|---|
| OEM | Hitachi | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Tokyo Electron Clean Track |
| Specifications | ||
| Configuration | — | Multi Block[1] |
| Manufacturer | — | Tokyo Electron (TEL)[1] |
| Model | — | Clean Track Mark 8[1] |
| Type | — | Resist Coater / Developer[1] |
| Wafer Size | — | 8 inch[1] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →