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1305 BSG 3versusStorm 300 Wafer Cleaning

Hitachi 1305 BSG 3, Semitool Storm 300 Wafer Cleaning, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
Storm 300 Wafer CleaningSemitool
OEMHitachiSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3Semitool Storm 300 Wafer Cleaning
Specifications
Category—Wet Processing / Clean[1]
OEM—Semitool[2]
Model—Storm 300[2]
Wafer size—12 inch[2]
Vintage—2010[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing