Comparison ledger
Hitachi 1305 BSG 3, SCREEN SU 3200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | SU 3200SCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN SU 3200 |
| Specifications | ||
| Configuration | — | Chemicals Used: - H3PO4 (Phosphoric Acid) - IPA (Isopropyl Alcohol) - H2O2 (Hydrogen Peroxide) - TM-Y Chemical Tanks / Channels: - 12 channels FOUP Ports: - 4[1] |
| Make | — | SCREEN / DNS[1] |
| Model | — | SU 3200[1] |
| Tool type | — | single-wafer cleaner[2] |
| Wafer size | — | 12 inch (300 mm)[3] |
| Maximum throughput | — | up to 800 wafers per hour[3] |
| Maximum chambers | — | up to 12 chambers[3] |
| Chamber arrangement | — | 12 chambers in four three-level towers[3] |
| Wafer handler | — | Kawasaki robot[3] |
| Chemical supply system | — | dynamic direct injection (DDI) or cabinet-type chemical supply system[3] |
| Communication protocol | — | SECS/GEMS[3] |
| Software version | — | P2485STD00V2485STD00[3] |
| Power rating | — | 208AC-3 Phase[3] |
| Chemicals used | — | H3PO4 (Phosphoric Acid), IPA (Isopropyl Alcohol), H2O2 (Hydrogen Peroxide), TM-Y[1] |
| Chemical tanks / channels | — | 12 channels[1] |
| FOUP ports | — | 4[1] |
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