Waferpedia

Comparison ledger

1305 BSG 3versusDSS 200 Series II Brush

Hitachi 1305 BSG 3, Ontrak DSS 200 Series II Brush, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
OEMHitachiOntrak
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3Ontrak DSS 200 Series II Brush
Specifications
Manufacturer—Ontrak[1]
Model—DSS 200 Series II Brush[2]
Category—Wet Processing / Clean[1]
Tool type—Brush Scrubber[2]
Vintage—1996[2]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing