Waferpedia

Comparison ledger

HMO-50versus0332 F 9453 302 Diffusion

Heller HMO-50, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
HMO-50Heller
OEMHellerVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHeller HMO-50Varian 0332 F 9453 302 Diffusion
Specifications
Machine typeHorizontal in-line magazine curing oven[1]—
Material handlingMagazine loader and unloader[1]—
Conveyor systemMagazine return conveyor system[1]—
Oven Dimensions (W x D x H)3300 mm x 1650 mm x 2500 mm[2]—
Loader Dimensions (W x D x H)1050 mm x 1500 mm x 2100 mm[2]—
Unloader Dimensions (W x D x H)1400 mm x 1500 mm x 2100 mm[2]—
Bypass Dimensions (W x D x H)3000 mm x 500 mm x 950 mm[2]—
Total Dimensions (with loaders and bypass) (W x D x H)5400 mm x 2000 mm x 2500 mm[2]—
Max Operating Temperature150°C[2]—
Temperature Uniformity (on product)±5°C[2]—
Heating MethodForced air convection[1]—
ConfigurationHorizontal in-line with magazine loader, unloader, and return conveyor system[1]—
Asset Number—142841[3]
Last Confirm Date—October 14, 2025[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]sinerji-grup.comsinerji-grup.com
  3. [3]Equipment inventory listing
  4. [4]fab-spares.comfab-spares.com