Comparison ledger
Headway PWM 32 PS CB 15 Spinner, Hitachi 1305 BSG 3, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PWM 32 PS CB 15 SpinnerHeadway | 1305 BSG 3Hitachi |
|---|---|---|
| OEM | Headway | Hitachi |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Headway PWM 32 PS CB 15 Spinner | Hitachi 1305 BSG 3 |
| Specifications | ||
| Configuration | Used with organic solvents[1] | — |
| Voltage | 115 Vac[1] | — |
| Model | PWM 32 PS CB 15[1] | — |
| Model designation | PWM32-PS-CB15 Spinner System[2] | — |
| Bowl | Circular bowl, 15" diameter[2] | — |
| Process use | Used with organic solvents[1] | — |
| Stage | Vacuum stage[1] | — |
| Power | 115 Vac[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Powered lid option | CB15 Powered Lid Option[2] | — |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →