Comparison ledger
Filmetrics R50, Veeco Dektak, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | R50Filmetrics | DektakVeeco |
|---|---|---|
| OEM | Filmetrics | Veeco |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics R50 | Veeco Dektak |
| Specifications | ||
| Default configuration | configured by default for metallic layers[1] | — |
| Default sample thickness | 525 um +/- 25 um[1] | — |
| Equipment section | Metrology[1] | — |
| Related equipment on same page group | AIT CMT-SR2000N 4-Point Probe Measurement System; MPI TS150 Probe Station[1] | — |
| Measurement type | 4-point probe[1] | — |
| Default material | metallic layers[1] | — |
| Manufacturer | — | Veeco[2] |
| Model | — | DEKTAK 150[2] |
| Purpose | — | Stylus-based scanning system for measuring surface topography and thin film step heights[3] |
| Tip Size | — | 12 µm[2] |
| Standard Stylus Tip | — | 2.5 μm[3] |
| Scan Length | — | 55 - 200 mm[2] |
| Maximum Data Points per Scan | — | 120,000[2] |
| Maximum Sample Size | — | 200 mm[2] |
| Sample Diameter | — | up to 200 mm in diameter[3] |
| Sample Thickness | — | up to 90 mm thick[3] |
| Stylus Force | — | 1 - 15 mg[2] |
| X-Y Translation | — | 101.6 x 101.6 mm[3] |
| Stage Type | — | Two-axis, manual sample-positioning stage[3] |
| Stage Leveling and Rotation | — | Manual stage leveling and rotation[3] |
| Leveling | — | Two-point programmable or cursor software leveling[3] |
| Environmental Enclosure | — | Acrylic environmental enclosure[3] |
| Maximum sample thickness | — | 90 mm[3] |
| X-Y translation range | — | 101.6 x 101.6 mm[3] |
| Long scan length | — | 55 mm[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →