Comparison ledger
Filmetrics F54, Melles Griot 05 LHP 151, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | F54Filmetrics | 05 LHP 151Melles Griot |
|---|---|---|
| OEM | Filmetrics | Melles Griot |
| Category | Precision Optics | Precision Optics |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics F54 | Melles Griot 05 |
| Specifications | ||
| instrument type | spectroscopic ellipsometer[1] | — |
| measurement | thicknesses and refractive indices of thin films[1] | — |
| substrate size | Up to 200 mm wafers[1] | — |
| light source | Xenon Arc lamp 75W[1] | — |
| wavelength range | 210 nm to 2500 nm[1] | — |
| spot size without focusing probes | 3 to 4 mm beam diameter[1] | — |
| spot size with focusing probes | 120 microns beam diameter[1] | — |
| stage | Motorized XY stage mapping[1] | — |
| z stage | Motorized Z and Autofocus[1] | — |
| tilt alignment | Automatic Tilt Alignement Routine[1] | — |
| Configuration | — | With 05 LPL 340 Power Supply (Does not power on)[2] |
| Equipment type | — | Laser[2] |
| Make | — | Melles Griot[2] |
| Model | — | 05 LHP 151[2] |
| Power state | — | Does not power on[2] |
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