Comparison ledger
Espec EHS-222M-L, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EHS-222M-LEspec | 1007KLA |
|---|---|---|
| OEM | Espec | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Espec EHS-222M-L | KLA 1007 |
| Specifications | ||
| Category | Highly accelerated stress test system (HAST chamber)[1] | — |
| Model | EHS-222M-L[1] | 1007[2] |
| Interior dimensions | φ394×L626 mm[1] | — |
| Manufacturer | — | KLA[2] |
| Description | — | Wafer Prober[2] |
| Wafer size | — | 150 mm[2] |
| Convertible to 8 inch wafer size | — | Yes[2] |
| Vintage | — | 01.06.1995[2] |
| Make | — | KLA[3] |
| Equipment type | — | Prober[3] |
Plan your fab
Building a Test & Probe process? Get a complete equipment list.
Open the fab equipment planner →