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Comparison ledger

DFP 8160 Fully Automatedversus1 DP 41

Disco DFP 8160 Fully Automated, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
OEMDiscoLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DFP 8160 Fully AutomatedLogitech 1 DP 41
Specifications
ManufacturerDisco[1]—
ModelDFP 8160[1]1 DP 41[4]
Tool typeFully automated polisher[1]—
CategoryCMP[2]—
Wafer size8-inch to 12-inch wafers[3]—
Phase—3 Phase[4]
Configuration—50/60 Hz[4]
Voltage—480 V[4]
Make—Logitech[4]
Frequency—50/60 Hz[4]
Current—12 amps[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing