Waferpedia

Comparison ledger

3220versusDFD 6240 Fully Automatic Dicing

Disco 3220, Disco DFD 6240 Fully Automatic Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 3220Disco DFD 6240 Fully Automatic Dicing
Specifications
equipment typedicing saw[1]—
Workplace sizeø150 mm[2]—
Spindle layoutSingle[2]—
Spindle output1.5 kW at 30,000 min-1[2]—
Spindle max revolution speed40,000 min-1[2]—
X-axis feed speed range0.1 – 500 mm/s[2]—
Y-axis index step0.0001 mm[2]0.0001 mm[3]
Z-axis repeating accuracy0.001 mm[2]—
Z-axis max blade sizeø58 mm[2]—
Max workpiece size—Φ8 inch[3]
X-axis cutting range—210 mm[3]
Cutting speed (X-axis)—0.1–1,000 mm/s (0.1–600 mm/s in source 3/6)[3]
Y-axis cutting range—210 mm[3]
Y-axis positioning accuracy—Within 0.002/210 mm (single error)[3]
Z-axis max stroke—19.22 mm (for Φ2 inch blade) / 19.9 mm (for Φ3 inch blade)[3]
Z-axis moving resolution—0.00005 mm[3]
Z-axis repeatability accuracy—0.001 mm[3]
Max blade size—Φ58 mm (or Φ2 inch/Φ3 inch blades depending on spindle option)[3]
θ-axis max rotating angle—380 deg[3]
Spindle output (standard)—1.2 kW at 60,000 min⁻¹[3]
Rated torque (1.2 kW spindle)—0.19 N·m[3]
Revolution speed range (1.2 kW spindle)—6,000–60,000 min⁻¹[3]
Spindle options—1.8 kW (2 inch blades), 2.2 kW (3 inch blades)[3]
Equipment dimensions (W×D×H)—900 mm × 1,190 mm × 1,800 mm[3]
Equipment weight—Approx. 1,200 kg (without transformer) / approx. 1,280 kg (with transformer)[3]
Applicable tape frame—2-8-1[4]
Power consumption (processing)—1.5 kW (for reference)[5]
Power consumption (warm-up)—1.0 kW (for reference)[5]
Air pressure—0.5–0.8 MPa[4]
Average air consumption during operation—110.0 L/min(ANR) (for reference)[4]
Clean air pressure—0.5–0.8 MPa[4]
Average clean air consumption during operation—70.0 L/min(ANR) (for reference)[4]
Cutting water / spinner cleaning water / water curtain pressure—0.2–0.4 MPa[4]
Max consumption flow rate (cutting water)—6 L/min[4]
Max consumption flow rate (water curtain)—1 L/min[4]
Cooling water pressure—0.2–0.4 MPa[4]
Cooling water consumption flow rate—1.5 L/min at 0.3 MPa[4]
Exhaust duct capacity—5.0 m³/min[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]disco.co.jpdisco.co.jp
  4. [4]tstvn.comtstvn.com
  5. [5]fabsurplus.comfabsurplus.com