Comparison ledger
Disco 321, Disco DAG810, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | DAG810Disco |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Disco DAG810 |
| Specifications | ||
| OEM | Disco[1] | — |
| Model | 321[1] | — |
| Equipment type | Wafer Dicing Saw[1] | compact, automatic grinder[4] |
| Facility context | Cleanroom Instrumentation[1] | — |
| Application area | Nano and Micro Fabrication[1] | — |
| Location | FNT 4.106[1] | — |
| Wafer Size | Up to 6 inches[2] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3] | — |
| Spindle Power (alternate) | 1500 Watt spindle[2] | — |
| Non-Contact Setup | Non Contact Setup[3] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3] | — |
| Broken Blade Detection | Broken Blade Detection[3] | — |
| Light Tower | Includes Light Tower[3] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[2] | — |
| Wafer size capability | Up to 6" wafers[3] | — |
| Chuck | 6-inch porous film frame chuck[2] | — |
| Spindle power | 1500-watt spindle[2] | — |
| Footprint | Small footprint[2] | — |
| Setup | Non-contact setup[3] | — |
| Blade break detection | Broken blade detection[3] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[3] | — |
| Materials | — | silicon, III/V materials (GaN, GaAs, InP), and various glass types (pure amorphous SiO2, float glass, pyrex)[4] |
| Wafer sizes supported by universal vacuum chuck table | — | 4", 5", 6", and 8"[4] |
| Mechanical frame use | — | for UV-tape mounted wafers or chips[4] |
| Spindle | — | high-rigidity, low-vibration spindle[4] |
| Grinding wheels | — | dedicated wheels for coarse and fine silicon grinding, coarse and fine glass grinding, and GaN fine grinding[4] |
| Probe-height | — | real-time probe-height from 4" wafer size[4] |
| User interface | — | LCD touch screen[4] |
| Grinding speed | — | as high as 30 microns/min[4] |
| Thickness variation | — | total thickness variation close to one micron[4] |
| Surface roughness | — | less than 100 nm[4] |
| Type | — | Automatic surface grinder[4] |
| Wafer sizes supported | — | 4", 5", 6", 8"[4] |
| Maximum grinding speed | — | 30 microns/min[4] |
| Total thickness variation (TTV) | — | ~1 micron[4] |
| Chuck table | — | One universal vacuum chuck table for 4", 5", 6", 8" wafer sizes[4] |
| Clamping | — | One mechanical frame clamping for UV-tape mounted wafers or chips[4] |
| Cooling method | — | Water cooling[4] |
| Materials processed | — | Silicon, III/V materials (GaN, GaAs, InP), various glass types (pure amorphous SiO2, float glass, pyrex)[4] |
| Workpiece types | — | Single wafers, stacked wafers, chips[4] |
| Wafer size support | — | 4", 5", 6", 8"[4] |
| Spindle type | — | High-rigidity, low-vibration spindle[4] |
| Supported wafer sizes | — | 4", 5", 6", 8"[4] |
| Wheel types | — | dedicated grinding wheels: coarse and fine silicon, coarse and fine glass, GaN fine[4] |
| Thickness reduction phases | — | 2 or 3 different phases with decreasing feed speed[4] |
| Cooling | — | water cooling to clear particles and mud[4] |
| Total thickness variation | — | close to one micron[4] |
| Chucking | — | one universal vacuum chuck table; one mechanical frame clamping for UV-tape mounted wafers or chips[4] |
| Operation interface | — | LCD touch screen[4] |
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