Comparison ledger
Dektak 8, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 8Dektak | |
|---|---|---|
| OEM | Dektak | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Dektak 8 | KLA .498 PSL Wafer |
| Specifications | ||
| Measurement Technique | Stylus profilometry[1] | — |
| Scan Length Range | 50 mm (2 in.) standard; 100 mm (4 in.) optional[1] | — |
| Max Wafer Size | 200 mm (8 in.)[1] | — |
| Step Height Repeatability | 7.5 Å, 1 sigma on 1 μm step[1] | — |
| Vertical Range | 262 μm standard; 1 mm optional[1] | — |
| Vertical Resolution | 1 Å max (@ 6.55 μm range)[1] | — |
| Max Sample Thickness | 25.4 mm (1 in.)[1] | — |
| Stylus Force | 1 to 15 mg with standard LIS 3; 0.03 to 15 mg with N-Lite sensor option[1] | — |
| Stylus Options | Stylus radius options from 0.2 to 25 μm; Super Sharp 50 nm stylus for use with N-Lite; High Aspect Ratio (HAR) tips for 10 μm D x 2 μm W trenches or 200 μm D x 20 μm W trenches[1] | — |
| Dimensions (W x D x H) | 457 mm x 610 mm x 483 mm (18 in. x 24 in. x 19 in.)[1] | — |
| Weight | 48 kg (105 lbs)[1] | — |
| Input Voltage | 100-120 VAC / 200-240 VAC, 50-60 Hz[1] | — |
| Temperature Range | 15 to 30 °C (59 to 86 °F)[1] | — |
| Humidity Range | ≤ 80%, non-condensing[1] | — |
| Configuration | — | NIST Traceable[2] |
| NIST traceability | — | Yes[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →