Comparison ledger
CEE 1000 Hot Plate, Tokyo Electron A 8 S ZA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | A 8 S ZATokyo Electron | |
|---|---|---|
| OEM | CEE | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 1000 Hot Plate | Tokyo Electron A 8 |
| Specifications | ||
| Configuration | 4"[1] | PoCl3 furnace[2] |
| Type | Hot Plate[1] | — |
| Wafer Size | 4 inch[1] | — |
| Furnace type | — | PoCl3 furnace[2] |
| Control system | — | EPROM based[2] |
| Vintage year | — | 1997[2] |
| Category | — | Thermal / Diffusion[3] |
| Vapor supply system | — | Schumacher M-Dot Vapor (unknown status)[2] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →