Waferpedia

Comparison ledger

1000 Hot PlateversusHerareus UT 6120 Drying

CEE 1000 Hot Plate, Thermo Fisher Herareus UT 6120 Drying, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEThermo Fisher
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateThermo Fisher Herareus UT 6120 Drying
Specifications
Configuration4"[1]—
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Tool type—Drying Oven[2]
Make—Thermo Scientific / Herareus[2]
Model—UT 6120[2]
Manufacturer—Thermo Fisher[3]
Category—Thermal / Diffusion[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com