Waferpedia

Comparison ledger

1000 Hot PlateversusSWA 93 GDA Laser Spike Annealer

CEE 1000 Hot Plate, Sumitomo SWA 93 GDA Laser Spike Annealer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEESumitomo
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateSumitomo SWA 93 GDA Laser Spike Annealer
Specifications
Configuration4"[1]—
TypeHot Plate[1]—
Wafer Size4 inch[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing