Waferpedia

Comparison ledger

1000 Hot PlateversusKokusai DJ 1206 V DF LPCVD

CEE 1000 Hot Plate, Hitachi Kokusai DJ 1206 V DF LPCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEHitachi
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateHitachi Kokusai DJ 1206 V DF LPCVD
Specifications
Configuration4"[1]—
TypeHot Plate[1]Low Pressure Chemical Vapor Deposition (LPCVD) Furnace[2]
Wafer Size4 inch[1]12 inch[2]
Manufacturer—Hitachi Kokusai[2]
Model—DJ 1206 V DF[2]
Year—2007[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing