Comparison ledger
Canon MPA 600 FA Projection, EV Group 101, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | |
|---|---|---|
| OEM | Canon | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon MPA 600 FA Projection | EV Group 101 |
| Specifications | ||
| Type | Projection Aligner[1] | — |
| Auto Feeder | Single or double, cassette to cassette, backside wafer handling[2] | — |
| Wafer Sizes | 4", 5", 6"[2] | — |
| Mask Sizes | 5", 6", 7"[2] | — |
| Resolution | 1.5 um (using positive resist)[2] | — |
| Illumination | 2 kW high pressure mercury lamp[2] | — |
| Wavelengths used | 365 nm (i-line), 405 nm (h-line), 436 nm (g-line)[2] | — |
| Intensity | (@ 1800 watts power output) 4" wafer - more than 700 mW, 5" wafer - more than 650 mW, 6" wafer - more than 600 mW[2] | — |
| Intensity / Exposure Uniformity | within +-3%[2] | — |
| Constant Temperature Control (CTC) | Monitors and controls system temperature within +-.3 degrees C.[2] | — |
| PDC | Matic Distortion Control provides fine distortion compensation[2] | — |
| Automatic Alignment | HeNe (633 nm) laser beam scanning[2] | — |
| Alignment Modes | Spot Beam / Sheet Beam[2] | — |
| Accuracy | 3 sigma <= .54 um[2] | — |
| OEM | — | EV Group[3] |
| Model | — | 101[3] |
| Equipment name | — | EVG 101 Spray Coater[3] |
| NEMO ID | — | evgspraycoat[3] |
| Training required | — | EVG 101 Training[3] |
| Training duration | — | 1.50 hours[3] |
| Processing technique | — | Resist Spray Coat (manual)[3] |
| Cleanliness | — | "All"[3] |
| Location | — | SNF Paul G Allen L107 Cleanroom[3] |
| Wafer diameter (substrate size) | — | up to 300 mm[4] |
| Available modules | — | Spin coat / OmniSpray® / develop[4] |
| Wafer handling options | — | Bowed / warped / thin wafer handling, edge handling[4] |
| Dispense options | — | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[4] |
| Processing technique (at SNF) | — | Resist Spray Coat (manual)[5] |
| Cleanliness group (at SNF) | — | "All"[3] |
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