Waferpedia

Comparison ledger

Vanguard 2000versus100R16

Buehler Vanguard 2000, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
OEMBuehlerStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler Vanguard 2000Strasbaugh 100R16
Specifications
Model Number63-2000[1]—
Serial Number587-VN2K-00104[1]—
Electrical220VAC, 50-60Hz, 12A[1]—
Platen Count6[2]—
Specimen CapacityUp to 6[2]—
FeaturesDispensing system, ultrasonic cleaner, specimen dryer[2]—
Programmability50 methods[2]—
Force ModesSingle-force or central-force[3]—
Voltage220VAC[3]—
Frequency50-60Hz[3]—
Current12A[3]—
type—1 spindle grinder/polisher[4]
drive system—DC drive system with 2 motors[4]
spindle RPM—1-180 RPM[4]
eccentric RPM—1-90 RPM[4]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[4]
capacity—16 inches[4]
spindle size—1-8 TPI[4]
overall dimensions—28 inches x 36 inches x 48 inches[4]
weight—500 lbs[4]
origin—made in the USA[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]bidspotter.combidspotter.com
  2. [2]trimudajatimitra.comtrimudajatimitra.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]excelltechnology.comexcelltechnology.com