Comparison ledger
Brooks 017-0146-01 Prealigner, Nikon NSR SF 155 i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | NSR SF 155 i-LineNikon |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Nikon NSR |
| Specifications | ||
| Configuration | — | SMIF / FOUP[1] |
| Load Module | — | SEMES EFEM[1] |
| Nikon Lens | — | SRI 12 M 4 IL 2 SS[1] |
| Reticle Size | — | 6 inch[1] |
| Wafer Type | — | Notch[1] |
| Inline Flow | — | In-Line[1] |
| Alignment System | — | FIA Modification for Colored Resist[1] |
| WL Type | — | 12 inch[1] |
| Mercury Lamp | — | 7.5 KW (SUV 7500 NI)[1] |
| LLTC TeompSetting | — | 23 Deg C[1] |
| Exposure Wavelength | — | i-line (365 nm)[2] |
| Light Source | — | Mercury lamp[2] |
| Reduction Ratio | — | 5×[2] |
| Resolution | — | ≥0.5 µm[2] |
| Wafer Sizes (standard) | — | 150 mm (6 inch) and 200 mm (8 inch)[2] |
| Stage System | — | Precision XY wafer stage with closed-loop positioning[2] |
| Operating System | — | Windows[1] |
| PM1 | — | UV Lamp[1] |
| PM2 | — | Stage[1] |
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