Waferpedia

Comparison ledger

017-0146-01 Prealignerversus2205 i 11 D

Brooks 017-0146-01 Prealigner, Nikon 2205 i 11 D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon 2205 i 11 D
Specifications
Wafer size—6 inch[1]
Category—Lithography[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com