Waferpedia

Comparison ledger

017-0146-01 Prealignerversus1505 G 7 E

Brooks 017-0146-01 Prealigner, Nikon 1505 G 7 E, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon 1505
Specifications
Configuration—5" reticle[1]
Wafer size—6 inch[1]
Reticle size—5 inch[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing