Comparison ledger
Brooks 017-0146-01 Prealigner, KLA OP 7341 XP Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | KLA |
| Category | Lithography | Lithography |
| Wafer size | — | 25 wafer load ports (Asyst) with robot transfer (2 paddies) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | KLA OP |
| Specifications | ||
| Configuration | — | CD (1D & 2D features) & film stack measurement[1] |
| Wafer size | — | 25 wafer load ports (Asyst) with robot transfer (2 paddies)[1] |
| Software | — | UNT 6.0[1] |
| OEM | — | KLA / Therma-wave[1] |
| Model | — | OP 7341 XP[1] |
| Measurement functions | — | CD (1D & 2D features) & film stack measurement[1] |
| Alignment | — | Prealigner & full alignment using Vision Processing[1] |
| Computing | — | External Server SuperGrendel for fast computation (168 cores)[1] |
| Load ports | — | 25 wafer load ports (Asyst) with robot transfer (2 paddies)[1] |
| Environment | — | Integrated Mini-Environment[1] |
| Measurement chamber | — | Separated optical table design[1] |
| Motion isolation | — | Pneumatic floating system ensuring no vibration for both stage and optics tables[1] |
| User interfaces | — | Two user interface (Front & Read)[1] |
| Communication | — | SECS / GEM full capability[1] |
| Auto-focus | — | Included[1] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →