Waferpedia

Comparison ledger

017-0024-01 PrealignerversusMA 8 BA 8 Gen 4 Pro Mask

Brooks 017-0024-01 Prealigner, SUSS MicroTec MA 8 BA 8 Gen 4 Pro Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrooksSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerSUSS MicroTec MA 8 BA 8 Gen 4 Pro Mask
Specifications
Equipment type—Mask Aligner / Bonder[1]
Make—SUSS[1]
Model—MA 8 / BA 8 Gen 4 Pro[1]
Vintage—2017[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing