Waferpedia

Comparison ledger

017-0024-01 PrealignerversusMA 4 6 Mask

Brooks 017-0024-01 Prealigner, SUSS MicroTec MA 4 6 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MA 4 6 MaskSUSS MicroTec
OEMBrooksSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerSUSS MicroTec MA 4 6 Mask
Cited variants—
Specifications
Voltage—220 V[1]
Configuration—500 VA[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing