Comparison ledger
Brooks 017-0024-01 Prealigner, EV Group 6200 NT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | 6200 NTEV Group |
|---|---|---|
| OEM | Brooks | EV Group |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | EV Group 6200 NT |
| Cited variants | — |
|
| Specifications | ||
| Voltage | — | 200V[2] |
| Manufacturer | — | EV Group[3] |
| Model | — | 6200 NT[3] |
| Tool type | — | Bond Aligner[3] |
| Configuration | — | Semi-automated or automated[1] |
| Wafer/substrate size | — | Up to 200 mm / 8 in[1] |
| Exposure source | — | Mercury light source / UV LED light source[1] |
| Exposure source options | — | Mercury lamp or UV LED lamp source[4] |
| Alignment accuracy | — | Top side alignment: ≤ ±0.5 µm; bottom side alignment: ≤ ±1.0 µm; IR alignment: ≤ ±2.0 µm; bond alignment: ≤ ±2.0 µm; NIL alignment: ≤ ±3.0 µm[1] |
| Throughput | — | Up to 180 WPH in first print mode; up to 140 WPH in automatic alignment mode[1] |
| Exposure modes | — | Vacuum contact / hard contact / soft contact / proximity / curved surface[5] |
| System control | — | Windows-based[5] |
| Multi-language user GUI and support | — | CN, DE, FR, IT, JP, KR[1] |
| Additional capabilities | — | Bond alignment, IR alignment, Nanoimprint lithography (NIL), SmartNIL[1] |
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