Comparison ledger
Brooks 017-0024-01 Prealigner, Canon FPA 6000 ES 6 a KrF, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | FPA 6000 ES 6 a KrFCanon |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | Canon FPA 6000 |
| Specifications | ||
| Configuration | — | 90nm[1] |
| Manufacturer | — | Canon[1] |
| Model | — | FPA 6000 ES 6 a[1] |
| Type | — | KrF Scanner[1] |
| Resolution / Node | — | 90nm[2] |
| Wafer Size | — | 12 inch (300mm)[2] |
| Laser Source | — | Cymer ELS-7310[2] |
| Reticle Size | — | 6 inch[2] |
| Reticle Configuration | — | Inline (R->L)[2] |
| Uniformity | — | 1.811%[2] |
| Intensity | — | 24299.68 W/m²[2] |
| Make | — | Canon[1] |
| Equipment type | — | KrF Scanner[1] |
| Process node | — | 90nm[2] |
| Wafer size | — | 12 inch[2] |
| Reticle | — | 6 inch reticle inline (R->L)[2] |
| Laser source | — | Cymer Laser (ELS-7310)[2] |
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