Comparison ledger
Brooks 017-0024-01 Prealigner, Canon FPA 2500 i 3 i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | FPA 2500 i 3 i-LineCanon |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | Canon FPA 2500 |
| Specifications | ||
| Reticle Size | — | 5"[1] |
| Wafer Type | — | Notch[1] |
| Auto Feed | — | Left Hand[1] |
| Chuck Type | — | Ring[1] |
| Optional Parts | — | Canon Reticle Charger[1] |
| Track Interface / Type | — | Yes[1] |
| Configuration | — | Software version; VS 5.26 BW[1] |
| Date | — | 6/19/2023[1] |
| IUC Uniformity NA/Sigma mode (54/60) | — | 517[1] |
| IUC Distribution NA/Sigma mode (54/60) | — | 1.5[1] |
| IUC Uniformity NA/Sigma mode (50/70) | — | N/A[1] |
| IUC Distribution NA/Sigma mode (50/70) | — | N/A[1] |
| Reticle Barcode | — | Canon[2] |
| Track interface / Type | — | Yes / Tel[2] |
| Software Version | — | VS 5.26 BW[2] |
| Wafer Size | — | 8 inch[1] |
| Track Interface | — | Yes / Tel[2] |
| Optional Part | — | Canon Reticle Charger[1] |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →