Comparison ledger
Brooks 017-0024-01 Prealigner, Canon 5500 iZA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | 5500 iZACanon |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | Canon 5500 iZA |
| Cited variants | — |
|
| Specifications | ||
| Model type | — | i-Line (365nm) Stepper[2] |
| Wafer size | — | 300mm; 200mm[2] |
| Resolution | — | ≤0.35μm[2] |
| Numerical Aperture (NA) | — | 0.45 ~ 0.57[2] |
| Reticle size | — | 6in. (0.25in. thick)[2] |
| Reduction ratio | — | 4:1[2] |
| Field size | — | 26mm x 33mm[2] |
| Overlay accuracy | — | ≤ 16nm (M+3)[2] |
| Throughput | — | ≥93wph (300mm); ≥155wph (200mm)[2] |
| Exposure wavelength | — | i-line (365nm)[2] |
| Lamp | — | 4.5kW high-pressured mercury lamp[2] |
| Overlay accuracy achieved | — | 16nm through reticle magnification compensation and through improvements in Z and tilt compensation accuracy, stage environment control accuracy, and calibration accuracy[2] |
| Platform | — | FPA-5000 platform[2] |
| Manufacturer | — | Canon[3] |
| Model | — | 5500 iZA[3] |
| Tool type | — | i-line stepper lithography system[1] |
| Last confirmed date | — | August 22, 2023[3] |
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