Waferpedia

Comparison ledger

5210 DTH Ultrasonicversus003163-000 SRD

Branson 5210 DTH Ultrasonic, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
5210 DTH UltrasonicBranson
003163-000 SRDSemitool
OEMBransonSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBranson 5210 DTH UltrasonicSemitool 003163-000 SRD
Specifications
Configuration12"[1]—
Make—Semitool[2]
Model—003163-000[2]
Equipment type—Spin Rinse Dryer (SRD)[2]
Asset #—139375[2]
Last Confirm Date—September 03, 2025[2]
5210 DTH Ultrasonic entry003163-000 SRD entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing