Waferpedia

Comparison ledger

IGF 6680 F 4versus1000 Hot Plate

Blue M IGF 6680 F 4, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBlue MCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M IGFCEE 1000 Hot Plate
Specifications
ConfigurationDigital programmable controller[1]4"[3]
TemperatureMaximum temperature 593°C[1]—
MakeBlue M[1]—
ModelIGF 6680 F 4[1]—
TypeGas Oven[1]Hot Plate[3]
ControllerDigital programmable controller[1]—
Overtemperature controllerPresent[1]—
Maximum temperature593°C[1]—
Gas inputInert gas input[1]—
Inside dimensions19"L x 18"W x 19.5"H[2]—
Electrical208/240V, 3Ph, 60Hz, 38.4A[2]—
Wafer Size—4 inch[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]bidservice.combidservice.com
  3. [3]inventory listing