Waferpedia

Comparison ledger

0 500versusPV 614

Blue M 0 500, BTU PV 614, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMBlue MBTU
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500BTU PV 614
Specifications
ManufacturerBlue M[1]—
Model0 500[1]PV 614[3]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]Solar firing furnace[2]
Heater type—IR Lamp[2]
Belt width—36 cm[2]
Conveyor speed—56-560 cm/min[2]
Load station—38 cm[2]
Unload station—38 cm[2]
Number of heated zones—6[2]
Maximum temperature rating—1000°C[2]
Operating temperature range—200-900°C[2]
Forced air cooling length—229 cm[2]
Atmosphere—CDA, typical 900 scfh / 25.2 m3/hr[2]
Process exhaust—Venturi Assist 2[2]
Electrical—400/230 VAC, 112 AMP, 81 KVA, 50/60 Hz[2]
Overall length—576 cm[2]
Overall width—96.5 cm[2]
Overall height—184 cm[2]
Serial number—ECN-1C[2]
OEM—BTU International[2]
Vintage—2013[2]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]solutions-on-silicon.comsolutions-on-silicon.com
  3. [3]Equipment inventory listing