Waferpedia

Comparison ledger

22 AD 42versusDAG810

Blanchard 22 AD 42, Disco DAG810, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
22 AD 42Blanchard
DAG810Disco
OEMBlanchardDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size—4"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlanchard 22 AD 42Disco DAG810
Specifications
Phase3 Phase[1]—
Frequency60 Hz[1]—
Voltage120 Vac[1]—
ConfigurationNo coolant tank[1]—
Equipment type—compact, automatic grinder[2]
Materials—silicon, III/V materials (GaN, GaAs, InP), and various glass types (pure amorphous SiO2, float glass, pyrex)[2]
Wafer sizes supported by universal vacuum chuck table—4", 5", 6", and 8"[2]
Mechanical frame use—for UV-tape mounted wafers or chips[2]
Spindle—high-rigidity, low-vibration spindle[2]
Grinding wheels—dedicated wheels for coarse and fine silicon grinding, coarse and fine glass grinding, and GaN fine grinding[2]
Probe-height—real-time probe-height from 4" wafer size[2]
User interface—LCD touch screen[2]
Grinding speed—as high as 30 microns/min[2]
Thickness variation—total thickness variation close to one micron[2]
Surface roughness—less than 100 nm[2]
Type—Automatic surface grinder[2]
Wafer sizes supported—4", 5", 6", 8"[2]
Maximum grinding speed—30 microns/min[2]
Total thickness variation (TTV)—~1 micron[2]
Chuck table—One universal vacuum chuck table for 4", 5", 6", 8" wafer sizes[2]
Clamping—One mechanical frame clamping for UV-tape mounted wafers or chips[2]
Cooling method—Water cooling[2]
Materials processed—Silicon, III/V materials (GaN, GaAs, InP), various glass types (pure amorphous SiO2, float glass, pyrex)[2]
Workpiece types—Single wafers, stacked wafers, chips[2]
Wafer size support—4", 5", 6", 8"[2]
Spindle type—High-rigidity, low-vibration spindle[2]
Supported wafer sizes—4", 5", 6", 8"[2]
Wheel types—dedicated grinding wheels: coarse and fine silicon, coarse and fine glass, GaN fine[2]
Thickness reduction phases—2 or 3 different phases with decreasing feed speed[2]
Cooling—water cooling to clear particles and mud[2]
Total thickness variation—close to one micron[2]
Chucking—one universal vacuum chuck table; one mechanical frame clamping for UV-tape mounted wafers or chips[2]
Operation interface—LCD touch screen[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]epfl.chepfl.ch