Comparison ledger
Axcelis NV 8200, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV 8200Axcelis | |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV 8200 | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Energy config. | from 3 to 250keV (single); up to 750 keV (triple)[1] | — |
| Wafer size | Wafer size 200mm with holders for different wafers sizes[1] | — |
| Dose | > 1E11at/cm²[1] | — |
| Beam current | I < 1mA[1] | — |
| Configuration | Gas lines:[1] | Platen ADV-S Type[4] |
| Ion sources | 3 ion sources with dual vaporizer on each source[1] | — |
| Magnet | Dipole magnet 90° - Buckley Systems – de 0 a 75 AMU in full charge[1] | — |
| Cryo compressor | CTI Cryogenics 9600[1] | — |
| Make | Axcelis[2] | — |
| Model | NV 8200[2] | — |
| Wafer Sizes | 8 inch[3] | — |
| Process gas lines | 4 process gas lines (BF2/PH3/AsH3/Hydrogen)[1] | — |
| Gas line | 1 gas line (Argon)[1] | — |
| Mass range | 0 to 75 AMU in full charge[1] | — |
| Target positioning / scanning system | Parallel beam; electrostatic angle correction programmable; tilt 0°-60°[1] | — |
| End station | Flat/notch alignment with buffet cassette (3 cassette positions); 3 axis robotic; Pick & Place system[1] | — |
| Turbo pumps | Edwards STP 1003C for Source; Pfeiffer HiPace 300 + Pfeiffer TPH 1201 P for Beam Line[1] | — |
| Rough pumps | Adixen A 103 P for Source; Adixen A 103 P for Beam Line; Alcatel/Adixen ADS 602 P for End Station[1] | — |
| Clamp type | Electrostatic clamp[1] | — |
| Software | SPARC V[1] | — |
| Soft | SPARC V[1] | — |
| Non-functional modules | PC remote[1] | — |
| Type | — | ESC Platen ADV-S Type[4] |
| Category | — | Ion Implantation[5] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →