Comparison ledger
Axcelis 200 PCU, Axcelis NV GSD HE Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | NV GSD HE IonAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Axcelis NV GSD HE Ion |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | 60 Hz[5] |
| Phase | 3 Phase[3] | 3 phase[5] |
| Voltage | 400 V[3] | — |
| Configuration | — | Refurbished in 2023[4] |
| Wafer size | — | 6" Wafer Handling Station Installed[4] |
| Full Load Current | — | 99 A[4] |
| Power | — | 82 kVA[4] |
| Input Breaker | — | 150 A[4] |
| Amp Rating Largest Load | — | 99 A[5] |
| Max Interrupt Capacity | — | 14 kA[4] |
| Beam Exhaust | — | 1 MeV[5] |
| Beam Current | — | 1 mA[4] |
| Main Computer | — | Solaris, SW 5.3[4] |
| Main Monitor | — | LCD[4] |
| Second Computer | — | Solaris[4] |
| Second Monitor | — | LCD[4] |
| OEM | — | Axcelis[4] |
| Model | — | NV GSD HE[4] |
| Category | — | Ion Implantation[5] |
| Wafer Sizes | — | 6, 8 inch[4] |
| Refurbished | — | 2023[4] |
| Beam Handling | — | Notch[4] |
| Dummy Cassette | — | 25[4] |
| Load Buffer | — | 17[4] |
| Vacuum Cassette | — | 17[4] |
| Beam Profile Oscilloscope | — | Included[4] |
| Wafer Handling Station Installed | — | 6 inch[4] |
| Disk Type | — | ACLS 11003980[4] |
| Gyro & Angle - Type & Degree | — | Alpha & Beta, +/-11 degrees[4] |
| Rotary Driver | — | 1200 rpm[4] |
| HV Power Supply | — | Hunting Hivolt[4] |
| HV Stack | — | Hunting Hivolt[4] |
| AMU | — | Buckley[4] |
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