Comparison ledger
Axcelis 200 PCU, Axcelis GSD 200 E, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | GSD 200 EAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Axcelis GSD 200 E |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | — |
| Voltage | 400 V[3] | — |
| Type | — | Ion Implanter[4] |
| OEM | — | Axcelis[4] |
| Model | — | GSD 200 E[4] |
| Documentation | — | Illustrated Parts Guide G-30-045AH14 Rev 06[5] |
| Product family | — | GSD[5] |
| Subtype (from component guide) | — | High Current (implied by section 'High Current Post Accel Extraction Electrode Assembly/Beam Guide')[5] |
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