Comparison ledger
Axcelis 200 PCU Photoresist Stabilizer, Laurell WS-750-23 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WS-750-23 BLaurell | |
|---|---|---|
| OEM | Axcelis | Laurell |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Laurell WS-750-23 B |
| Specifications | ||
| Configuration | 14 Amps[1] | — |
| Voltage | 380 V[1] | — |
| Frequency | 50 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Model Type | — | Spin Coater[3] |
| Series | — | 750-series[3] |
| Max. Substrate Size | — | ø 150mm (5" × 5")[3] |
| Max. RPM | — | 12000 rpm[3] |
| Mounting Options | — | Tabletop, In-Deck, On-deck[3] |
| Type | — | Spin Coater[3] |
| Maximum Substrate Size | — | Ø150mm (5" x 5")[3] |
| Maximum Speed | — | 12000 rpm[3] |
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