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Comparison ledger

200 PCU Photoresist Stabilizerversus300 X Spin

Axcelis 200 PCU Photoresist Stabilizer, Brewer Science 300 X Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
300 X SpinBrewer Science
OEMAxcelisBrewer Science
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD 200Brewer Science 300 X Spin
Specifications
Configuration14 Amps[1]Heavy Duty Drive[3]
Voltage380 V[1]208-240 V[3]
Frequency50 Hz[1]—
Phase3 Phase[1]—
P/N—901445[3]
Drive Type—Heavy Duty Drive[3]
Part Number—901445[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing