Comparison ledger
Axcelis 200 ACU, Lam Research 9600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | 9600Lam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research TCP 9600 |
| Specifications | ||
| Configuration | Parts Machine[1] | Envision Software[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Voltage | — | 208 V[5] |
| DSQ / Exit Load Lock | — | Heated paddle[6] |
| Wafer Size | — | 8 inch[5] |
| Software | — | Envision Software[5] |
| Load/Unload | — | Hine Cassette Indexer[5] |
| Entrance Load-lock | — | Present[5] |
| Remote AC Panel | — | Present[5] |
| Main Chamber Clamping | — | Bottom Actuated Clamping System[5] |
| Main Chamber Turbo Pump | — | Adixen Alcatel ATH 1300[5] |
| Main Chamber Valve | — | VAT 65[5] |
| Main Chamber Gas Configuration | — | 6 Gasses[5] |
| Main Chamber RF Generators | — | RPG 1250[5] |
| DSQ/Exit Load Lock Gas Configuration | — | 3 Gases[5] |
| DSQ/Exit Load Lock | — | WVDS, Heated Paddle, APM (Atmospheric Passivation Module)[5] |
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