Comparison ledger
Axcelis 17099370 Outer strike plate, Axcelis NV GSD 200 E 2 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | NV GSD 200 E 2 IonAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Axcelis NV GSD 200 |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | — |
| Manufacturer | Axcelis[2] | — |
| Model | 17099370 Outer strike plate[1] | — |
| Part number | OEM number 17099370[2] | — |
| Used with | Axcelis GSD 200[1] | — |
| Condition | NEW[2] | — |
| Cryo-Pumps | — | CTI/Edwards Onboard; OB-8 + OB-10 fully refurbished[3] |
| Cryo-Kompressor | — | CTI 9650 Low-Voltage[3] |
| Turbo-Pumps | — | Seiko STP A 2203 fully refurbished[3] |
| Terminal-Rough-Pump | — | without (Edwards IGX Config)[3] |
| End station Rough-Pump | — | without (Edwards IGX Config) bottom remote external[3] |
| Gas box | — | 5-String, 4x 2L Low-Pressure[3] |
| String 1 | — | Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3[3] |
| String 2 | — | BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380[3] |
| String 3 | — | Ash3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380[3] |
| String 4 | — | Ph3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3; PN:10010380[3] |
| String 5 | — | Argon Carriergas; MFC Brooks GF120 10sccm-N2[3] |
| Disk-Drive | — | Direct-Drive[3] |
| Dose-Type | — | Regular[3] |
| Source-Type | — | ELS4 IHC-Source without Vaporizer[3] |
| High voltage-Transformer | — | Oil[3] |
| Light-Tower | — | red/yellow/green; no buzzer[3] |
| Main-Workstation | — | SUN Solaris AXI 3HE (special case)[3] |
| Software-Version | — | 6.13.5.1 (no license included)[3] |
| Network | — | 24 port 100MB Ethernet with Cisco Router-Kit[3] |
| Cell-Controller | — | V6 Type[3] |
| Energy Config | — | 0 - 160Kv High current[4] |
| CE-Conformity | — | Yes[4] |
| Voltage | — | 208V[4] |
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