Comparison ledger
ASML 850 B KrF, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 850 B KrFASML | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | ASML | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML 850 B KrF | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Configuration | 2 DFA Arm[1] | — |
| OEM | ASML[1] | — |
| Model | 850 B[1] | — |
| Tool type | KrF Scanner[1] | — |
| Asset # | 74588[1] | — |
| Configured components | 2 DFA Arm; 1 RH IRL IRIS; 2 Reticle Carrier; 1 Athena OM OM; Cymer ELS-600[1] | — |
| Vintage | 2009[1] | — |
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