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Comparison ledger

4022.456.0049.1 Optical Stageversus05 LHP 151

ASML 4022.456.0049.1 Optical Stage, Melles Griot 05 LHP 151, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
05 LHP 151Melles Griot
OEMASMLMelles Griot
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASML 4022.456.0049.1 Optical StageMelles Griot 05
Specifications
ConfigurationASML 4022.456.1144[1]With 05 LPL 340 Power Supply (Does not power on)[3]
Optics & imaging193 nm[2]—
Configuration & optionsASML 4022.456.1144[2]—
ConditionUnit tested in good working condition[2]—
Equipment type—Laser[3]
Make—Melles Griot[3]
Model—05 LHP 151[3]
Power state—Does not power on[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com