Waferpedia

Comparison ledger

Producer GT 3 RTPversus0 V 500

Applied Materials Producer GT 3 RTP, Blue M 0 V 500, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Producer GT 3 RTPApplied Materials
0 V 500Blue M
OEMApplied MaterialsBlue M
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials ProducerBlue M 0 V 500
Specifications
ConfigurationPyra Anneal[1]—
OEMApplied Materials[1]—
ModelProducer GT 3[1]—
Tool typeRapid Thermal Process (RTP)[1]—
Wafer size12 inch[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing