Comparison ledger
Applied Materials Precision Implant xR 200 S High Current, Axcelis 200 PCU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Precision Implant xR 200 S High CurrentApplied Materials | 200 PCUAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2000 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials xR 200 S | Axcelis NV GSD 200 |
| Cited variants | — | |
| Specifications | ||
| Configuration | Chamber with Liners Turbo Pump (2)[3] | — |
| OEM | Applied Materials[3] | — |
| Model | Precision Implant xR 200 S[3] | — |
| Category | Ion Implantation[4] | — |
| Type | High Current Ion Implanter[4] | — |
| Wafer size | 8 inch[3] | — |
| Vacuum & pumping | Chamber with Liners Turbo Pump (2); Leybold Turbo Mech Parts; 8500 Cryo Pump (2); Backing Pumps (3); Cryo Pumps (2); Cryo Compressor Energy Range Acceleration Drift / Accel[4] | — |
| P/N | — | SC 4840 A[5] |
| Frequency | — | 50 Hz[5] |
| Phase | — | 3 Phase[5] |
| Voltage | — | 400 V[5] |
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