Comparison ledger
Applied Materials HEXP VIISta HE, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HEXP VIISta HEApplied Materials | 160 XP IonVarian |
|---|---|---|
| OEM | Applied Materials | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials HEXP VIISta HE | Varian 160 XP Ion |
| Specifications | ||
| Configuration | Includes:[1] | 150mm High Current IMP[3] |
| Chiller | SMC remote 20M[1] | — |
| Cryo Pump | 320FE CRYO OBIS,6[2] | — |
| Cryo Pump Exhaust | SS Cryo Exhaust Through Roof[2] | — |
| Cryo Compressor | IS-1000 KPa X 3[2] | — |
| Dosimetry | Advanced[1] | — |
| Facilities | Faci fr Botm(Air-N2-H2O-Power)[2] | — |
| Frequency | 60 Hz Operation[2] | — |
| Label Kit | English[1] | — |
| Load Lock Vent | 500 Load LockVent Std Finish[2] | — |
| Load Lock Vent Connection | 500 Vent Con Std Finish[2] | — |
| Manometer | Triple Manometer 0-1 kPa[1] | — |
| Power Kit | Standard Power Kit[1] | — |
| Profiler | Standard Rack and Pinion[1] | — |
| Remote Harness Kit | 20M Rem Facilites Kit - Floor[1] | — |
| RP3 Exhaust | RP3 PVC Exhaust Line - Roof[2] | — |
| Wafer Size | 8 inch (200mm)[1] | — |
| Platen Type | 200mm SiC[1] | — |
| Source Material | SiC[1] | — |
| UPS/CVCF | Standard UPS 3KVA - No CVCF[1] | — |
| VCS Software Package | VCS 9.XX (Specify revision)[1] | — |
| Roughing Pump Supply | Customer Supplied Pumps Onsite[1] | — |
| Turbo Pump Supply | VSE Supplied Pumps[1] | — |
| Wafer Handler Side Window Kit | Windows[1] | — |
| OEM | — | Varian[4] |
| Model | — | 160 XP Ion[4] |
| Category | — | Ion Implantation[3] |
| Tool type | — | ion implanter[3] |
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