Waferpedia

Comparison ledger

Complus 4 Tversus1.112 PSL Wafer

Applied Materials Complus 4 T, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Complus 4 TApplied Materials
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials ComplusKLA 1.112 PSL Wafer
Specifications
ConfigurationAsyst L P2200 SMIF Load Ports[1]NIST Traceable[2]
MC WorkstationSUN[1]—
Software Version10.6 on WS[1]—
IP Computer9.6[1]—
Installed magnificationsGF 15, GF 20, GF 30, GF 40, GF 20 T , GF 30 T ,GF 40 T[1]—
Custom Wafer Chuck12”/ 8” Standard[1]—
Wafer Size—8 inch[2]
NIST Traceable—True[2]
Compatible Tools—Surfscan 6xy0 and Sp1[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com