Waferpedia

Comparison ledger

Centura Enabler Oxideversus200 ACU

Applied Materials Centura Enabler Oxide, Axcelis 200 ACU, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Centura Enabler OxideApplied Materials
200 ACUAxcelis
OEMApplied MaterialsAxcelis
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials CenturaAxcelis NV GSD 200
Cited variants
  • Centura Enabler (2008 Vintage)[1]
  • Centura Enabler (Server OS Type 2008 Vintage)[2]
—
Specifications
ConfigurationServer OS Type[2]Parts Machine[5]
OEMApplied Materials[4]—
ModelCentura Enabler[4]200 ACU[5]
Equipment typeOxide Etcher[4]Asher[5]
Server OS Type2008 Vintage[2]—
MakeApplied Materials[4]—
Product typeOxide etcher[4]—
Vintage (documented units)2008[1]—
Server OS type (documented units)2008[2]—
Manufacturer—Axcelis[5]
Tool type—Asher[5]
Wafer size—200mm[7]
Serial number—AU6A356AH[7]
Computer system—M 200 PC, M 200[8]
Part number—SC 4572 A[8]
Volts—208[8]
Amps—30[8]
Wafer configuration—8 inch[6]

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Sources (8)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]inventory listing
  6. [6]semistarcorp.comsemistarcorp.com
  7. [7]wotol.comwotol.com
  8. [8]semistarcorp.comsemistarcorp.com