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0242-36515 RTP XE Chamber Temperature Match KitversusHMDS1

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, YES HMDS1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—YES HMDS1
Specifications
Model—YES HMDS1[1]
Equipment type—Oven[2]
Section—Lithography[2]
Name as listed on equipment page—YES HMDS1 Oven[2]
Serial number—87297[1]
Tool owner—Brian Baker[1]
Tool designation—YES HMDS1[1]
Location—Bay C[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]nanofab.utah.edunanofab.utah.edu